Problem
Etch rate could basically be measured easily by weighing the sample before and after etching, and translating that into the rate by taking the area into account. What resolution scale is needed to determine rates for:
- tungsten etching, 500 nm thickness
- silicon etching, 20 nm thickness.
Densities: W - 19.5 g/cm3, Si - 2.65 g/cm3
The response should include a reference list. Double-space, using Times New Roman 12 pnt font, one-inch margins, and APA style of writing and citations.