Problem
1. Electronic grade polysilicon is available with 0.01 ppb phosphorous concentration. What is the highest ingot resistivity that can be pulled from such a starting material?
2. If 50 kg of ultrapure polysilicon is loaded into a CZcrystal puller, how much boron should be added if the target doping level of the ingot is 10 ohm-cm?
The response should include a reference list. Double-space, using Times New Roman 12 pnt font, one-inch margins, and APA style of writing and citations.