1. Define micro electromechanical system.
2. What is the approximate size scale in microsystem technology?
3. Why is it reasonable to believe that microsystem products would be available at lower costs than products of larger, more conventional size?
4. What is a hybrid micro sensor?
5. What are some of the basic types of microsystem devices?
6. Name some products that represent microsystem Technology.
7. Why is silicon a desirable work material in microsystem technology?
8. What is meant by the term aspect ratio in microsystem technology?
9. What is the difference between bulk micromachining and surface micromachining?
10. What are the three steps in the LIGA process?