Problem
1. If a 2:1 aspect ratio via plug in 0.25µm technology has a resistance of 0.4 Ω, is it made of tungsten or copper?
2. What is copper plug resistance in 0.1µm technology?
3. What is the breakdown field requirement for low-k dielectrics?
The response should include a reference list. Double-space, using Times New Roman 12 pnt font, one-inch margins, and APA style of writing and citations.