Two parallel plate capacitor plates have an area of 1 mm^2 and a spacing of 1 µm(air gap). One is fixed and another is suspended by a mechanical spring with a force constant of 1 N/m.
a) What is the capacitance value (C0) when no voltage is applied between the two plates?
b) What is the pull-in voltage of (a)? Why is the pull-in voltage important to consider in the design of MEMS(Micro-electro-mechanical systems) devices?
c) What is the relative displacement of the suspended plate to its original position at the pull-in voltage?