1. Select a MEMS product (commercially available product)
(Examples)
- Accelerometer for airbag system or Wii remote
- Gyroscope for cameras
- Digital Micromirror Display (DMD) or Digital Light Processing (DLP) for projection system or 3D printing
- Pressure sensor for tires
- Microphones for laptops and cellular phones
- Inkjet printer head
- DNA/Protein chips for bio analysis
- Micro waveguide and optical switches for telecommunication
2. Research on the following three aspects via patents, journals, reports, online resources, etc.
· Design and Theory
· Fabrication
· Challenges and Prospect
3. Write a report (1200 words)
· No fixed format but must include the above mentioned three contents
· Include bibliography