Rate limiting steps in metal oxide epitaxy


Assignment:

"Metal deposition rates are easily converted into the oxide growth rate under the assumption that the metal arrival rates are the rate limiting steps, which is true for growth under oxygen- rich conditions."

(a) What is meant by metal arrival rates being "rate limiting steps?" (Does this refer to oxidation?)

(b) Why is this true? (Why are metal arrival rates rate limiting steps?)

(c) What exactly is meant by an "oxygen-rich environment?" I haven't seen a technical definition of an "oxygen-rich environment" anywhere in the literature.

Provide complete and step by step solution for the question and show calculations and use formulas.

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Chemistry: Rate limiting steps in metal oxide epitaxy
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