Answer the following questions.
Question 1)a) Explain the effect of photoresist on the resolution of optical microscope?
Question 2) Explain two practical imaging techniques.
Question 3) State four micro actuation mechanisms. How piezo materials and their mechanisms are used to effect micro actuations.
Question 4) Write brief notes on the following:
i) Tuner
ii) resonator.
Question 5) What is frequency dependency of Q factor of an inductor in Radio Frequency range.
Question 6) List the fabrication steps of MEMS planar inductor.
Question 7) List out various fluid actuation mechanisms. Write brief note on:
i) Dielectrophoresis.
ii) Electrowetting.
Question 8) Explain the principle of Biochemical sensors.