A capacitance sensorcomprising two parallel plates is used to measure displacement ofone electrode attached to a moving platform in a mircoscope. Themotion of this platform results in a displacement that results in acorresponding change in the electrode separation. The movingelectrode has a diameter of 8mm. The capacitance of this sensorvaries from 5 pF to 15 pF.
- If the circuit electronis produce a voltage that is linearlyproportional with a sensitivity of 2 V*pF^-1 to the differencebetween a 10 pF efrence cacacitor and the capacitance sensor, whatis the output voltage range of the sensor?
- If the capacitance gage electronics produces a noisespectral density of 12 aF*Hz^(-1/2), determine the displacement noise of the sensor with the electrodes at a position midway between maximum and minimum separation if the output signal isfiltered to provide bandwidth of 10, 100, and 1000 Hz?