How long does it take to grow 100nm of oxide in wet oxygen


How long does it take to grow 100nm of oxide in wet oxygen at 1000oc (assume 100crystal orientation of silicon) ? In dry oxygen? Which process would be perfect?

Solution Preview :

Prepared by a verified Expert
Other Engineering: How long does it take to grow 100nm of oxide in wet oxygen
Reference No:- TGS01155141

Now Priced at $15 (50% Discount)

Recommended (99%)

Rated (4.3/5)